Predictive Simulation of Semiconductor Processing
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.A cross-sectional SEM image of a circuit made in the 120 nm INTEL technology, with six levels of copper interconnects; from [86], with permission. Note the hierarchical wiring: interconnects in the upper layers are thicker in order to reduce theanbsp;...
| Title | : | Predictive Simulation of Semiconductor Processing |
| Author | : | Jaroslaw Dabrowski, Eicke R. Weber |
| Publisher | : | Springer Science & Business Media - 2013-03-09 |
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